The 81st JSAP Autumn Meeting, 2020

Tatsuya Okada

Chairperson, etc.

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Kuniyuki Kakushima(Tokyo Tech), Tatsuya Okada(Univ. of the Ryukyus)