The 81st JSAP Autumn Meeting, 2020

Takashi Kawakubo

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Chairperson, etc.

Wed. Sep 9, 2020 10:30 AM - 11:00 AM Z25

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.2 Applications and technologies of electron beams

[9a-Z25-6~7] 7.2 Applications and technologies of electron beams

Mitsunori Kitta(AIST), Takashi Kawakubo(Natl. Inst. of Tech., Kagawa College)