9:30 AM - 9:45 AM
[10a-Z04-1] Two-dimensional characterization of Au/Ni/n-GaN Schottky contacts with different surface treatments by scanning internal photoemission microscopy
Keywords:GaN, Schottky contact, scanning internal photoemission microscopy
SIPM measurement was conducted for Au/Ni/n-GaN Schottky contats with different surface treatments. The contacts with the surface treatment A showed good unformity after annealing at 400 C. However, the contacts with B exhibited poor I-V and nonuniformity.