11:00 〜 11:15
▲ [10a-Z05-10] Deposition of Crystallized Yttria Stabilized Zirconia (YSZ) Films on Cellulose Nanopaper (CNP) Substrates at Low Temperature by Reactive Sputtering
キーワード：Sputtering, YSZ, low temperature
Our research group has previously reported that yttria stabilized zirconia (YSZ) film is quite effective to stimulate crystallization of amorphous silicon (a-Si) at low temperature. A crystallized YSZ film can be deposited on a non-heat resistive cellulose nanopaper (CNP) substrate without any damage using DC magnetron sputtering with Ar and O2, which indicates a high possibility to fabricate a poly-Si TFT on CNP. CNP has been a promising substrate for fabrication of eco-friendly, cheap and flexible electronics. Previously, we have reported pre-sputtering and sputtering conditions to deposit crystallized YSZ on glass substrates. In this meeting, we further discuss deposition parameters and YSZ crystallization process on CNP in detail. Also, we discuss damage of CNP due to heat and plasma during the deposition process.