[10a-Z10-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-Z10-10] Fabrication and evaluation of diamond SBD using Minimal fab (II)

〇Hideyuki Watanabe¹, Kazumasa Nemoto¹, Takashi Yajima¹, Shuichi Noda¹, Fumito Imura¹, Mickael Lozach¹, Hitoshi Umezawa¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

Keywords:diamond, CMP, Minimal fab