〇Yongxun Liu¹, Katsuhisa Murakami¹, Xiaoguang Li², Kazumasa Nemoto¹, Shuichi Noda¹, Hiroyuki Tanaka¹, Kazuhiro Koga³, Sommawan Khumpuang^1,3, Yukinori Morita¹, Takashi Matsukawa¹, Shiro Hara^1,3, Masaki Takeguchi², Masayoshi Nagao¹ (1.AIST, 2.NIMS, 3.MINIMAL)

〇Toshihiro Takeshita¹, Sommawan Khumpuang^1,2, Kazumasa Nemoto¹, Shiro Hara^1,2, Takeshi Kobayashi¹ (1.AIST, 2.MINIMAL)

〇Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Hiroyuki Tanaka¹, Shunichirou Shinbori^2,3, Chikatsu Iwase^2,3, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.SUNYOU)

〇Takashi Yajima¹, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Mickael Lozach¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, Device Technology Research Institute, Minimal System Group, Tsukuba, 2.Minimal Fab Promoting Organization, AIST, Tsukuba)

〇kazushige sato^1,4, Takashi Chiba^1,4, Masao Terada^1,4, Kengo Hamada^1,4, Yoshiyuki Nakayama³, Yoshiaki Kanamori³, Hiroyuki Tanaka², Masashi Kase², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Tohoku Univ., 4.Sakaguchi E.H VOC Corp.)

〇Hiroshige Kogayu¹, Kazuhiro Koga¹, Takeshi Hamamoto¹, Shuichi Noda², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)

〇Masashi Kase¹, Kazuhiro Koga², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Kenta Hori¹, Toru Watanabe¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

Mitsuko Muroi¹, Mana Otani¹, 〇Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

〇Masaya Hotta¹, Hiroshi Nishizato¹, Haruki Toonoe², Ikunari Shiba², Takuya Maeda³, Satoshi Fujii³ (1.HORIBA STEC, 2.Yokogawa S. S., 3.N.I.T, Okinawa Coll.)

〇Shuichi Noda¹, Fumito Imura¹, Yuuki Yabuta³, Naoko Yamamoto³, Ryuichiro Kamei³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)

〇Noriko Miura¹, Naoki Hashimoto^1,2, Yoshitaka Kitamura^1,2, Fumito Imura³, Kazushige Sato¹, Kazuhiro Koga¹, Yuuki Ishida^1,3, Toshiyuki Oodaira³, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)

〇Kazuhiro Koga¹, Masashi Kase², Kazushige Sato¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)

〇Mana Otani¹, Atsuhiro Motomiya¹, Toshinori Takahashi¹, Mitsuko Muroi¹, Hitoshi Habuka¹, Shin-ichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)

〇Fumito Imura¹, Michihiro Inoue¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

〇Fumito Imura¹, Michihiro Inoue¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

〇Shuhei Nakamichi¹, Hiroyuki Tanaka², Fumito Imura², Shuichi Noda², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab, 2.AIST)

〇Kazumasa Nemoto¹, Takashi Yajima¹, Kazuhiro koga², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

〇Hideyuki Watanabe¹, Kazumasa Nemoto¹, Takashi Yajima¹, Shuichi Noda¹, Fumito Imura¹, Mickael Lozach¹, Hitoshi Umezawa¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Akira Toriumi¹, Tomonori Nishimura² (1.Univ. Tokyo (retired), 2.Univ. Tokyo)

〇(M2)Kenta Kiya¹, Akio Furukawa¹ (1.Tokyo University of Science)

〇Toshifumi Imajo^1,4, Kenta Moto^3,4, Keisuke Yamamoto², Takashi Suemasu¹, Hiroshi Nakashima³, Kaoru Toko^1,4 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ., 4.JSPS Research Fellow)

〇Nobuaki Tarumi¹, Shohei Hayashi¹, Naohiko Kawasaki¹, Yuji Otsuka¹ (1.Toray Research Center)

〇Shogo Shigemasu¹, Hideaki Tanimura¹, Hikaru Kawarazaki¹, Shinichi Kato¹, Yoshihide Nozaki¹ (1.SCREEN SPE)

〇(M1C)Rei Kuriki¹, He Wang¹, Tomohiro Mihira², Toshiaki Suzuki¹, Takayuki Yoshino¹, Masaaki Niwa¹, Mitsuya Motohashi¹ (1.Tokyo Denki Univ, 2.JEOL)

〇(D)Nguyen ThiKhanh Hoa¹, Yuri Mizukawa¹, Hiroaki Hanafusa¹, Shohei Hayashi², Seiichiro Higashi¹ (1.Hiroshima Univ., 2.Toray Research Cent.)

〇Kazuo Tsutsui¹, Taihei Matsuhashi¹, Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Tsutomu Nagayama², Takahiro Higuchi², Shinichi Kato³, Hideaki Tanimura³, Takayuki Muro⁴, Tomohiro Matsushita⁵, Yoshitada Morikawa⁶ (1.Tokyo Tech, 2.Nissin Ion Equipment, 3.SCREEN, 4.JASRI, 5.NAIST, 6.Osaka Univ.)

〇(M1)Longxiang Men¹, Ryo Yokogawa^1,2, Yoichiro Numasawa^1,2, Kazuo Tsutsui³, Kuniyuki Kakushima³, Atsushi Ogura^1,2 (1.Meiji University, 2.MREL, 3.Tokyo Tech. Inst.)

〇Masahiro Mori¹, Masashi Akabori¹, Masahiko Tomitori¹, Takashi Masuda¹ (1.JAIST)

〇Yurina Amamoto¹, Akasaka Shunsuke^1,2, Kanno Isaku² (1.ROHM, 2.Kobe Univ.)

〇(M2)Ryuji Kawakita¹, Hiroaki Hanafusa², Yuri Mizukawa², Seiichiro Higashi² (1.AdSM,Hiroshima Univ., 2.AdSE,Hiroshima Univ.)

〇Xuesi Li¹, Xianyin Hu¹, Sho Hashimoto¹, Ang Li¹, Reo Kometani¹, Ichiro Yamada², Makiko Noma², Katsufumi Nakanishi², Yusuke Fukuda², Kazuyuki Sashida², Toshiyuki Takemori², Kenichi Maehara², Katsuya Ikeda², Kenichi Yoshida², Yoshio Mita¹, Shin'ichi Warisawa¹ (1.Univ. of Tokyo, 2.Shindengen Co., Ltd.)

〇(M2)Takashi Ichikawa¹, Ken Atsumi¹, Tatsuya Koga¹, Shin-ichi Iida², Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

〇(M1)Akihiro Uchiyama¹, Takashi Ichikawa¹, Tatsuya Koga¹, Shin-ichi Iida², Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Kenichi Yoshida², Kazuyuki Sashida², Katsuya Ikeda², Ryosuke Ikeda², Toshiyuki Takemori² (1.Yamagata Res Inst Tech, 2.Shindengen)

〇Ya Zhang¹, Yuri Yoshioka¹ (1.TUAT)