Kenta Hori

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 8:30 AM - 11:30 AM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-Z10-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:15 AM

[9a-Z10-10] Oxygen concentration in SiC_xN_yO_zthin film produced by room temperature PECVD

〇Kenta Hori¹, Toru Watanabe¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)