〇Yongxun Liu¹, Katsuhisa Murakami¹, Xiaoguang Li², Kazumasa Nemoto¹, Shuichi Noda¹, Hiroyuki Tanaka¹, Kazuhiro Koga³, Sommawan Khumpuang^1,3, Yukinori Morita¹, Takashi Matsukawa¹, Shiro Hara^1,3, Masaki Takeguchi², Masayoshi Nagao¹ (1.AIST, 2.NIMS, 3.MINIMAL)

〇Toshihiro Takeshita¹, Sommawan Khumpuang^1,2, Kazumasa Nemoto¹, Shiro Hara^1,2, Takeshi Kobayashi¹ (1.AIST, 2.MINIMAL)

〇Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Hiroyuki Tanaka¹, Shunichirou Shinbori^2,3, Chikatsu Iwase^2,3, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.SUNYOU)

〇Takashi Yajima¹, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Mickael Lozach¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, Device Technology Research Institute, Minimal System Group, Tsukuba, 2.Minimal Fab Promoting Organization, AIST, Tsukuba)

〇kazushige sato^1,4, Takashi Chiba^1,4, Masao Terada^1,4, Kengo Hamada^1,4, Yoshiyuki Nakayama³, Yoshiaki Kanamori³, Hiroyuki Tanaka², Masashi Kase², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Tohoku Univ., 4.Sakaguchi E.H VOC Corp.)

〇Hiroshige Kogayu¹, Kazuhiro Koga¹, Takeshi Hamamoto¹, Shuichi Noda², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)

〇Masashi Kase¹, Kazuhiro Koga², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Kenta Hori¹, Toru Watanabe¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

Mitsuko Muroi¹, Mana Otani¹, 〇Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)