kazushige sato

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Speaker, Author, Co-Author

Wed. Sep 9, 2020 8:30 AM - 11:30 AM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-Z10-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM

[9a-Z10-7] Development of Minimal laser hydrogen annealing tool to flatten the surface

〇kazushige sato^1,4, Takashi Chiba^1,4, Masao Terada^1,4, Kengo Hamada^1,4, Yoshiyuki Nakayama³, Yoshiaki Kanamori³, Hiroyuki Tanaka², Masashi Kase², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Tohoku Univ., 4.Sakaguchi E.H VOC Corp.)

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