MEMS and 3D-structure Fabrication Potential in Minimal Fab

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 9, 2020 8:30 AM - 11:30 AM Z10

Yan Wu(Nihon Univ.)

9:00 AM - 9:15 AM

〇Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

Keywords:MEMS, 3D Fabrication, minimal fab