The 81st JSAP Autumn Meeting, 2020

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-Z10-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 9, 2020 8:30 AM - 11:30 AM Z10

Yan Wu(Nihon Univ.)

8:45 AM - 9:00 AM

[9a-Z10-2] Fabrication of ultra-thin piezoresistive sensor chip using Minimal Fab

Toshihiro Takeshita1, Sommawan Khumpuang1,2, Kazumasa Nemoto1, Shiro Hara1,2, Takeshi Kobayashi1 (1.AIST, 2.MINIMAL)

Keywords:Minimal Fab, FHE, MEMS