[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-12] Application of Meniscus Force Mediated Layer Transfer to Roll-to-Roll process

〇(M2)Ryuji Kawakita¹, Hiroaki Hanafusa², Yuri Mizukawa², Seiichiro Higashi² (1.AdSM,Hiroshima Univ., 2.AdSE,Hiroshima Univ.)

Keywords:semiconductor, Roll-to-Roll

Flexible electronics have been developed with materials such as amorphous silicon (a-Si), organic, and oxide semiconductor that can be fabricated at a low temperature. Compared with these materials, Single-crystalline silicon (c-Si) devices have high electrical performance, reliability and ability to fabricate CMOS circuits and memories. If hybrid devices made from these materials are integrated on flexible substrates, flexible hybrid electronics would make great progress. In our previous work, we have proposed our own technique for transferring c-Si films onto a PET substrate by meniscus force at a low process temperature (Meniscus Force Mediated Layer Transfer: MLT) . However, in order to mass-produce devices by MLT, it is necessary to apply MLT to Roll-to-Roll process known as a method for high throughput and low cost. In this study, I attempt to make the process to perform MLT while moving the substrates.