Fumito Imura

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 11:30 AM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-Z10-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM

[10a-Z10-6] Half-Inch Sized Multi-Chip Packaging

〇Fumito Imura¹, Michihiro Inoue¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

10:30 AM - 10:45 AM

[10a-Z10-7] Laser-Via Interconnection for Half-Inch Sized Multi-Chip Packaging

〇Fumito Imura¹, Michihiro Inoue¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)