Masahiro Mori

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:15 PM - 3:30 PM

△ [10p-Z10-10] [Highlight]Non-thermal conversion of liquid Si to solid phase by electron beam irradiation

〇Masahiro Mori¹, Masashi Akabori¹, Masahiko Tomitori¹, Takashi Masuda¹ (1.JAIST)