The 81st JSAP Autumn Meeting, 2020

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Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Kuniyuki Kakushima(Tokyo Tech), Tatsuya Okada(Univ. of the Ryukyus)

12:30 PM - 1:00 PM

[10p-Z10-1] [The 42nd Best Review Paper Award Speech] Ge research activities after publishing the awarded JJAP paper

〇Akira Toriumi1, Tomonori Nishimura2 (1.Univ. Tokyo (retired), 2.Univ. Tokyo)

Keywords:germanium