The 81st JSAP Autumn Meeting, 2020

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Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Kuniyuki Kakushima(Tokyo Tech), Tatsuya Okada(Univ. of the Ryukyus)

1:15 PM - 1:30 PM

△ [10p-Z10-3] Solid-phase crystallization of GeSn thin films on insulating films for improving TFT performance

〇Toshifumi Imajo1,4, Kenta Moto3,4, Keisuke Yamamoto2, Takashi Suemasu1, Hiroshi Nakashima3, Kaoru Toko1,4 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ., 4.JSPS Research Fellow)

Keywords:Ge, Solid-phase crystallization, Thin film