Fabrication of Zinc Oxide thin films grown on PET films by Electrochemical Deposition

Masataka Katsuumi; Chinatsu Higuchi; Yohei Kasuya; Naoko Jotaki; Tetsuya Akasaka

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[10a-Z20-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Sep 10, 2020 9:00 AM - 12:15 PM Z20

Yutaka Furubayashi(Kochi Univ. of Tech.), Hiroyuki Nishinaka(Kyoto Inst. of Tech.)

9:00 AM - 9:15 AM

[10a-Z20-1] Fabrication of Zinc Oxide thin films grown on PET films by Electrochemical Deposition

〇(M1)Masataka Katsuumi¹, Chinatsu Higuchi¹, Yohei Kasuya¹, Naoko Jotaki¹, Tetsuya Akasaka¹ (1.Meisei Univ.)

Keywords:zinc oxide, flexible

We have fabricated ZnO thin films highly oriented to (0001) direction by electrochemical deposition on PET films coated with conductive ITO. The ZnO films are expected to be applied to transparent flexible electronic devices. We have evaluated the structures and surface morphology of the ZnO films by changing growth parameters such as the concentration of the water solution, electrodeposition time, and current density.