[10a-Z28-1~13] 17.2 Graphene

[10a-Z28-5] Measurement of Electrical Properties for Graphene on Sapphire Using Transmitting THz-TDS and THz-TDSE

〇(M1)Hiroki Suzuki¹, Kiichi Sato¹, Takashi Fujii^1,2, Shinichiro Mouri¹, Tsutomu Araki¹, Toshiyuki Iwamoto², Yukinori Satou², Yuki Ueda³, Shigeya Naritsuka³ (1.Ritsumeikan Univ., 2.PNP, 3.Meijo Univ.)

Keywords:graphene, THz, Ellipsometry

We are developing a technique to measure the electrical properties of graphene (sheet resistance, carrier concentration and mobility) without electrodes. Currently, there are high expectations for technology to measure the electrical properties of graphene on metal. In this case, reflection spectroscopy, a substrate independent measurement method, is necessary. In this paper, considering the in-plane anisotropy of r-plane sapphire, we compare and discuss the sheet resistance of graphene measured using THz ellipsometry, THz transmission measurements and Hall measurements.