[10p-Z05-1~19] 6.4 Thin films and New materials

△ [10p-Z05-11] Analysis on Effects of Underlayer on Corrosion Resistance of Ag-based Transparent Conductive Film in Chloride Solution

〇Tomohiro Otani¹, Yuto Toshimori¹, Sohei Nonaka¹ (1.Mitsubishi Materials Corp.)

Keywords:transparent conductive film, Ag alloy, corrosion resistance

Effects of underlayer on the corrosion resistance of Ag-based transparent conductive film (TCO/Ag alloy/TCO, TCO: transparent conductive oxide) in a chloride solution were analyzed. The corrosion resistance was enhanced by underlayer through facilitating the crystal growth of Ag alloy. A detailed mechanism behind this phenomenon was elucidated. Furthermore, these findings motivated us to develop a new oxide for the underlayer, which realized significant Cl^- tolerance of the film.