[10p-Z05-1~19] 6.4 薄膜新材料

[10p-Z05-7] Synthesis of Nickel-related compounds Films via Metal-EDTA Complex Solution
with Strong Heat Process

Zhenyu Guo¹、Liang Shaoji¹、Atsushi Nakamura^2,1、〇Keiji Komatsu¹、Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech.、2.Chubu Chelest Co., Ltd.)

キーワード：Metal-EDTA Complex Solution, Strong Heat Process, Nickel-related compounds