[10p-Z09-1~20] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-Z09-1] Water Flow for Quick Batch-Type Silicon Wafer Wet Cleaninig

〇Toshinori Takahashi¹, Habuka Hitoshi¹, Goto Akihiro² (1.Yokohama Nat. UniV, 2.Pre--Tech)

Keywords:silicon wafer wet cleaning bath, water flow

In order to prevent contamination from circulating in the wet cleaning bath for semiconductor silicon wafers, in the previous report, we proposed that pinholes be set up on the upper ends of the four walls of the cleaning bath, and verified by visualization experiments. In order to create a flow that can be cleaned in shorter time, we examined a structure which has pinholes on the upper ends of the two side walls of the cleaning bath.