[10p-Z13-1~8] Leading edge of phonon engineering

[10p-Z13-1] Multi-functional Electronic Gas Sensors realized with Nano-scale Thermal Management

〇Ken Uchida¹, Takahisa Tanaka¹ (1.Univ. Tokyo)

Keywords:molecular sensor, thermal management

With the advent of the Internet of things era, it is becoming more and more important to sense physical and chemical information around us. However, measuring the concentration and kinds of gas molecules around us with low energy is extremely challenging. By using Joule-heating-induced thermal energy localized in nano-scale materials as energy source necessary for molecular sensing, we succeeded in reducing energy consumption greatly compared with conventional gas sensors using external heaters. By using the localized thermal energy, we can make sensors multifunctional and integrate multiple types of sensors on a chip.