[10p-Z13-1~8] Leading edge of phonon engineering

[10p-Z13-4] Thermophysical Properties of Functional Thin Films

〇Yuzo Shigesato¹, Nobuto Oka², Junjun Jia³, Makoto Kashiwagi¹, Yuichiro Yamashita⁴, Takashi Yagi⁴, Naoyuki Taketoshi⁴ (1.Aoyama Gakuin Univ., 2.Kindai Univ., 3.Waseda Univ., 4.AIST)

Keywords:functional thin films, Thermophysical properties, nano-picosecond thermoreflectance technique

Thermophysical properties of the various functional thin films including metals, oxide semiconductors, highly degenerated wide-bandgap semiconductors, i.e. transparent conductive oxides, various nitride thin films, have been analyzed by nano-picosecond thermoreflectance technique. The relationships between thermal conductivity and electrical conductivity were analyzed in terms of the Wiedemann-Franz law to clarify the heat transfer carried by free electrons. The heat transfer carried by phonon was also discussed in correlation with the various properties, such as crystallinity, polycrystalline structures, Young’s modulus.