[10p-Z22-6~18] 1.6 Ultrasonics

△ [10p-Z22-11] Propagation and resonance properties of leaky SAW on LiNbO₃ thin plate bonded to similar-material substrate

〇(M2)Takumi Fujimaki¹, Masashi Suzuki¹, Shoji Kakio¹ (1.Univ. of Yamanashi)

Keywords:LSAW, Similar-material bonded, LiNbO3

In this report, the propagation and resonance properties of a leaky surface acoustic wave (LSAW) on similar-material bonded structure of LiNbO₃ (LN) were evaluated experimentally. Based on the theoretical results, a 5°Y-cut X-propagating LN (5°YX-LN) and a 64°YX-LN were chosen as the thin plate and the support substrate, respectively. The 5°YX-LN/64°YX-LN bonded sample showed the minimum propagation loss of 0.005 dB/λ at a certain normalized thin plate thickness for the free surface. This is one order of magnitude smaller than that for the single 64°YX-LN sample. For a resonator on the 5°YX-LN/64°YX-LN, a fractional bandwidth twice as large as that of the single 64°YX-LN sample (8.6%) and a larger resonance response than those of the single 5°YX-LN sample were obtained.