[10p-Z22-6~18] 1.6 Ultrasonics

[10p-Z22-15] Identification method of wireless SAW sensor based on mass loading effect

〇Naoki Horikawa¹, Kondoh Jun¹ (1.Shizuoka Univ.)

Keywords:Surface acoustic wave, Passive surface acoustic wave sensor, Sensor identification

In this study, gold is loaded as a load film on the SAW propagation surface on the SAW device, the phase difference and SAW propagation time are measured when the film thickness is changed, and the tendency of the change is examined. We conducted an experiment for the purpose. In the phase difference measurement, a correlation was obtained between the phase difference and the film thickness. In the SAW propagation time measurement, a correlation was obtained between the film thickness and the propagation time when the film thickness was large. It is considered that the SAW sensor can be identified by applying these results.