[11a-Z08-1~9] 10.1 新物質・新機能創成（作製・評価技術）

▲ [11a-Z08-1] Layer thickness and underlayer dependence of perpendicular magnetic anisotropy in Cu₂Sb-type (Mn-Cr)AlGe films

〇Takahide Kubota^1,2、Keita Ito^1,2、Rie Umetsu^1,2,4、Masaki Mizuguchi^1,2,3、Koki Takanashi^1,2,4 (1.IMR, Tohoku Univ.、2.CSRN, Tohoku Univ.、3.JST-CREST、4.CSIS, Tohoku Univ.)

キーワード：perpendicular magnetization, intermetallic compounds, manganese

Layer thickness dependence of perpenducular magnetic anisotropy in Cu₂Sb-type MnAlGe and (Mn-Cr)AlGe films were investigated. The (001)-textured samples were successfully fabricated onto thermally oxidized silicon substrates. Perpendicular magnetization was maintained down to the layer thickness of 5 nm. A role of uderlayer and capping layer materials, and the effect of dead layer will be discussed in the presentation.