The 81st JSAP Autumn Meeting, 2020

Presentation information

Oral presentation

9 Applied Materials Science » 9.2 Nanoparticles, Nanowires and Nanosheets

[11a-Z26-1~13] 9.2 Nanoparticles, Nanowires and Nanosheets

Fri. Sep 11, 2020 8:30 AM - 12:00 PM Z26

Kazuki Nagashima(Univ. Tokyo), Fumitaro Ishikawa(Ehime Univ.)

10:45 AM - 11:00 AM

[11a-Z26-9] Interfacial intermixing controls of Ge/Si core-shell nanowires using thermal annealing treatment

Wipakorn Jevasuwan1, Xiaolong Zhang1, Naoki Fukata1 (1.NIMS)

Keywords:Nanowire, Core-shell, Chemical vapor deposition

The heterostructure Ge/Si NWs have been suggested as potential building blocks to realize future high-performance transistor applications. Many efforts have been done to optimize structures, selective doping, carrier concentrations, and interface properties to be able to use NWs for nanodevices. However, the formation of a sharp interface and good crystallinity have not yet been optimized to enhance hole carrier accumulation. In this study, the thermal annealing effects on i-Ge/p-Si core-shell NWs were investigated. The morphology, interface, and crystalline property were analyzed by controlling the annealing parameters.