[11a-Z27-1~6] 11.4 Analog applications and their related technologies

[11a-Z27-3] Study on surface analysis of sputtered Nb thin film for Direct Bonding

〇Yuta Takahashi¹, Masahisa Fujino², Hiroshi Nakagawa², Masahiro Aoyagi², Katsuya Kikuchi², Hiroaki Myoren¹, Masato Naruse¹, Tohru Taino¹ (1.Saitama Univ., 2.AIST)

Keywords:superconductor