The 81st JSAP Autumn Meeting, 2020

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Oral presentation

8 Plasma Electronics » 8.8 Plasma Electronics Award Speech

[11p-Z03-1~2] 8.8 Plasma Electronics Award Speech

Fri. Sep 11, 2020 12:30 PM - 1:30 PM Z03

Yuichi Setsuhara(Osaka Univ.)

12:30 PM - 1:00 PM

[11p-Z03-1] [Plasma Electronics Award Speech] Insights into etching properties of atomic layer etching process for dielectric films

〇Nobuyuki Kuboi1 (1.Sony semiconductor solutions corporation)

Keywords:Atomic layer etching, Dielectric film, Simulation