Demonstrationof beta-(AlGa)<sub>2</sub>O<sub>3</sub>-channel metal-semiconductor field effect transistors

Presentation information

Oral presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

Fri. Sep 11, 2020 1:00 PM - 4:45 PM Z04

Masashi Kato(Nagoya Inst. of Tech.)

2:00 PM - 2:15 PM

〇Hironori Okumura¹, Yuji Kato², Takayoshi Oshima², Tomas Palacios³ (1.Tsukuba Univ., 2.Saga Univ., 3.MIT)

Keywords:Gallium oxide, Power device, FET