The 81st JSAP Autumn Meeting, 2020

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[11p-Z12-1~17] 15.7 Crystal characterization, impurities and crystal defects

Fri. Sep 11, 2020 12:30 PM - 5:15 PM Z12

Kazuhisa Torigoe(SUMCO), Susumu Maeda(GWJ), Takuo Sasaki(QST), Haruo Sudo(GlobalWafers)

4:00 PM - 4:15 PM

[11p-Z12-13] Analysis of metal gettering in pn junctions by Hakoniwa method

〇Eiji Kamiyama1,2, Hiroki Nagakura2, Koji Sueoka2 (1.GlobalWafers Japan Co., Ltd., 2.Okayama Pref. Univ.)

Keywords:Silicon, Gettering, Impurity Metal

「箱庭法」を適用する一例として，各種デバイスのキー要素であるpn接合部における，金属のゲッタリング挙動を解析する手法について述べる