[11p-Z23-1~20] 16.3 Bulk, thin-film and other silicon-based solar cells

[11p-Z23-11] Formation of p-n patterned a-Si by ion implantation through a hard mask — Evaluation of passivation quality

〇Tu ThiCam Huynh¹, Noboru Yamaguchi², Keisuke Ohdaira¹ (1.JAIST, 2.ULVAC)

Keywords:counter-doping, plasma ion implantation, passivating contacts