[11p-Z23-1~20] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [11p-Z23-15] Evaluation of damage induced by sputtering deposition of transparent conductive oxide films

〇Hiroki Kanai¹, Tappei Nishihara¹, Atsushi Ogura^1,2 (1.Meiji Univ., 2.Meiji Renewable Energy Laboratory)

Keywords:transparent conductive film

The relationship between the sputtering condition of the transparent conductive films and the damage to the crystalline silicon was evaluated.