[8a-Z05-1~11] 6.2 Carbon-based thin films

[8a-Z05-6] Structural analysis of DLC film under mechanical pressure

〇(M1)Ayumu Takada¹, Syuji Obata¹, Noboru Miyata², Norifumi Yamada³, Tsukasa Miyazaki², Akihiko Homma¹, Kenji Hirakuri¹, Yasuharu Ohgoe¹ (1.Tokyo Denki Univ., 2.CROSS, Neutron Science and Technology Center, 3.High Energy Accelerator Research Organization (KEK))

Keywords:Diamond like Carbon

There are many unclear points about the film structure change of DLC film under compression. Based on these results, in this study, we investigated two types of aC:H film with a high hydrogen content and a Sputtering aC (:H) film with a low hydrogen content, which differed in film structure. Study was carried out. From the membrane structure analysis, it was confirmed that the DLC membrane had a change in membrane structure when pressed at 500 kPa. It was also suggested that the change in the film structure under compression was larger in the Sputtering a-C (:H) film with a lower hydrogen content than in the a-C:H film with a high hydrogen content.