[8a-Z09-1~10] 22.1 Joint Session M "Phonon Engineering"

[8a-Z09-7] High surface phonon-polariton thermal conductance along coupled films

〇Saeko Tachikawa¹, Jose Ordonez-Miranda², Yunhui Wu¹, Laurent Jalabert^1,3, Roman Anufriev¹, Sebastian Volz^1,3, Masahiro Nomura¹ (1.IIS, Univ. of Tokyo, 2.Inst. Pprime, CNRS, 3.LIMMS/CNRS-IIS)

Keywords:Surface phonon-polaritons, Heat transfer, semiconductor material

We calculated the SPhP thermal conductance in SiO₂/Si/SiO₂ three-layer structure. We have found the coupling of SPhPs propagating along SiO₂ nanolayers enhances the SPhP heat transport. The three-layer structure exhibits the SPhP thermal conductance higher than that of a single SiO₂ film when SiO₂ thicker than 150 nm, even ten times higher when SiO₂ thicker than 600nm. This work proposes the structure that can outperform the in-plane thermal performance of a single suspended film while improving significantly its mechanical stability.