[8a-Z17-1~10] 6.1 Ferroelectric thin films

[8a-Z17-5] Deposition of Pb(Zr, Ti)O₃ thin films on glass substrate

〇(M2)Kazuki Ueda¹, Hirotaka Hida¹, Isaku Kanno¹ (1.Kobe Univ.)

Keywords:piezoelectric thin film, glass substrate, Pb(Zr, Ti)O3

Pb(Zr, Ti)O3 (PZT) piezoelectric thin film is a material with high piezoelectricity, and its application to various MEMS devices is usually studied by forming it on a Si substrate. On the other hand, by forming a PZT thin film on a transparent substrate such as glass, it is expected to be applied to optical devices such as touch panels and smart windows [1]. In this study, PZT thin film was formed on a glass substrate coated with a transparent electrode film, and its electrical or piezoelectric properties were evaluated.