[8p-Z17-1~12] 6.1 Ferroelectric thin films

[8p-Z17-6] Composition dependence of crystal structure and piezoelectric properties of epitaxial (K, Na)NbO₃ thin films grown on Si substrates

〇Yoshikazu Sai¹, Goon Tan², Isaku Kanno¹ (1.Kobe Univ., 2.Osaka prefecture Univ.)

Keywords:piezoelectric thin film, lead free

(K, Na)NbO3 (KNN) has attracted attention as a promising candidate for lead-free piezoelectric thin film materials because of its high piezoelectricity and Curie point. From the conventional research, it is necessary to optimize the crystal orientation and composition to obtain high piezoelectricity. We have succeeded in epitaxially growing KNN thin film on Si substrate. In this study, KNN thin films with different K/Na compositions were prepared, and their crystal structure and electrical/piezoelectric properties were evaluated.