[8p-Z21-1~7] 8.1 Plasma production and diagnostics

[8p-Z21-4] Improving Multipole Magnets/Conductance and Effects of Empirical Methods for Increasing Yield of Multicharged Ion Beams on ECRIS

〇Shuhei Harisaki¹, Wataru Kubo¹, Issei Owada¹, Koichi Sato¹, Kazuki Tsuda¹, Yushi Kato¹ (1.Osaka Univ.)

Keywords:plasma, ion beam, electron cyclotron resonance

In order to realize more efficient electron cyclotron resonance (ECR) plasma generation, we improved our ECR ion source (ECRIS) focused on the multipole magnetic field in the vacuum chamber and the conductance of the main exhaust system (Diffusion Pump: DP). We also conducted plasma generation experiments using low Z gas mixing and pulse modulated microwaves for the purpose of increasing the yield of multicharged ion beams. We are going to report the experimental results on high yield of multicharged ion beams.