2:45 PM - 3:00 PM
[8p-Z21-5] Simple Gas Mixing Effects on Electron Cyclotron Resonance Multicharged Ion Source
Keywords:plasma, electron cyclotron resonance, gas mixing
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Tue. Sep 8, 2020 1:30 PM - 3:30 PM Z21
Shusuke Nishiyama(Hokkaido Univ.)
2:45 PM - 3:00 PM
Keywords:plasma, electron cyclotron resonance, gas mixing