3:00 PM - 3:15 PM
[8p-Z21-6] Measurements of Decelerated Ar/Xe Ion Beam Profiles with X-Y Wire Probe for Evaluating Sputtering Yield of Satellite Materials at Low Energy Region
Keywords:beam profile, Ar ion beam, Xe ion beam
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Tue. Sep 8, 2020 1:30 PM - 3:30 PM Z21
Shusuke Nishiyama(Hokkaido Univ.)
3:00 PM - 3:15 PM
Keywords:beam profile, Ar ion beam, Xe ion beam