[8p-Z21-1~7] 8.1 Plasma production and diagnostics

[8p-Z21-5] Simple Gas Mixing Effects on Electron Cyclotron Resonance Multicharged Ion Source

〇Kazuki Tsuda¹, Shuhei Harisaki¹, Wataru Kubo¹, Issei Owada¹, Koichi Sato¹, Yushi Kato¹ (1.Osaka Univ.)

Keywords:plasma, electron cyclotron resonance, gas mixing