[8p-Z21-1~7] 8.1 Plasma production and diagnostics

[8p-Z21-6] Measurements of Decelerated Ar/Xe Ion Beam Profiles with X-Y Wire Probe for Evaluating Sputtering Yield of Satellite Materials at Low Energy Region

〇Koichi Sato¹, Kazuki Okumura¹, Shuhei Harisaki¹, Wataru Kubo¹, Issei Owada¹, Kazuki Tsuda¹, Yushi Kato¹ (1.Osaka Univ.)

Keywords:beam profile, Ar ion beam, Xe ion beam