4:00 PM - 4:15 PM
[8p-Z25-11] Surface modification of MoS2 by GCIB and investigation of etching conditions
Keywords:gas culster ion beam, molybdenum sulfide
Oral presentation
CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.4 & 7.5
Tue. Sep 8, 2020 1:15 PM - 4:45 PM Z25
Toshio Seki(Kyoto Univ.), Kousuke Moritani(兵庫県立大)
4:00 PM - 4:15 PM
Keywords:gas culster ion beam, molybdenum sulfide