The 81st JSAP Autumn Meeting, 2020

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Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.4 & 7.5

[8p-Z25-1~13] 【CS.1】 Code-sharing Session of 2.4 & 7.5

Tue. Sep 8, 2020 1:15 PM - 4:45 PM Z25

Toshio Seki(Kyoto Univ.), Kousuke Moritani(兵庫県立大)

4:15 PM - 4:30 PM

△ [8p-Z25-12] Surface reactions on hfac adsorbed NiO surface by GCIB irradiation

〇(M2)Kota Uematsu1, Noriaki Toyoda1 (1.Univ.of Hyogo)

Keywords:Gas cluster ion beam, Atomic layer etching