The 81st JSAP Autumn Meeting, 2020

Presentation information

Print

Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.4 & 7.5

[8p-Z25-1~13] 【CS.1】 Code-sharing Session of 2.4 & 7.5

Tue. Sep 8, 2020 1:15 PM - 4:45 PM Z25

Toshio Seki(Kyoto Univ.), Kousuke Moritani(兵庫県立大)

4:30 PM - 4:45 PM

△ [8p-Z25-13] Metal etching by neutral cluster beam irradiation in reactive gas

〇(M1)Takaki Ota1, Noriaki Toyoda1 (1.Univ of Hyogo)

Keywords:cluster beam, atomic layer etching