[8p-Z25-1~13] 【CS.1】 Code-sharing Session of 2.4 & 7.5

[8p-Z25-9] Clustering fragment ions from energy-dependent SIMS spectra

〇Kousuke Moritani¹, Tetsuro Masumoto¹, Tomomichi Nakamura², Norio Inui¹ (1.Engineering, Univ. of Hyogo, 2.Simulation, Univ. of Hyogo)

Keywords:SIMS, multivariate analysis, cluster ion beam

We have found that the fragment pattern of organic molecules by irradiation with primary cluster ion beam changes depending on the energy per atom (eV / n) of primary ion in cluster SIMS. In this study, we attempted to classify fragment ion peaks in the spectra by analyzing energy-dependent cluster SIMS spectra using a multivariate analysis technique.