[9a-Z10-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-Z10-1] Development of Liquid TEM Cell Fabrication Process Using Minimal Fab Tools

〇Yongxun Liu¹, Katsuhisa Murakami¹, Xiaoguang Li², Kazumasa Nemoto¹, Shuichi Noda¹, Hiroyuki Tanaka¹, Kazuhiro Koga³, Sommawan Khumpuang^1,3, Yukinori Morita¹, Takashi Matsukawa¹, Shiro Hara^1,3, Masaki Takeguchi², Masayoshi Nagao¹ (1.AIST, 2.NIMS, 3.MINIMAL)

Keywords:Minimal Fab