Fabrication of ultra-thin piezoresistive sensor chip using Minimal Fab

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 9, 2020 8:30 AM - 11:30 AM Z10

Yan Wu(Nihon Univ.)

8:45 AM - 9:00 AM

〇Toshihiro Takeshita¹, Sommawan Khumpuang^1,2, Kazumasa Nemoto¹, Shiro Hara^1,2, Takeshi Kobayashi¹ (1.AIST, 2.MINIMAL)

Keywords:Minimal Fab, FHE, MEMS