[9p-Z18-1~21] 3.7 Laser processing

△ [9p-Z18-3] Femtosecond-Laser Direct Writing of Electrically Conductive Structures on PDMS

〇Shuichiro Hayashi¹, Fumiya Morosawa¹, Mitsuhiro Terakawa^1,2 (1.Grad. Sch. Keio Univ., 2.Keio Univ.)

Keywords:femtosecond laser processing, soft material, flexible devices

In this study, electrically conductive structures were fabricated by focusing and scanning femtosecond laser pulses onto the surface of polydimethylsiloxane (PDMS). The Raman spectra obtained from the fabricated structures showed distinctive peaks, that correspond to graphene’s D, G, and 2D band, indicating the formation of graphitic carbon. Transmission electron microscopy (TEM) observations of the fabricated structures confirmed the formation of SiC nanocrystals, as well as multilayer graphitic carbon, by laser-based modification of PDMS. Furthermore, electrical conductivity measurements of structures fabricated using various fabrication parameters, suggest that the amount of defect in the formed graphitic carbon affects the electrical conductivity of the fabricated structures. A preliminary demonstration of strain sensing was performed using the fabricated structures, indicating the potential of the structures fabricated by the proposed method for flexible device applications.