[9p-Z19-1~16] 3.15 Silicon photonics and integrated photonics

△ [9p-Z19-6] Investigation of microring resonator switch based on hybrid MOS optical phase shifter

〇Shuhei Ohno¹, Qiang Li¹, Naoki Sekine¹, Hanzhi Tang¹, Stephane Monfray², Frederic Boeuf², Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.the Univ. of Tokyo, 2.STMicroelectronics)

Keywords:Si photonics, Optical phase shifter, Microring resonator

We propose microring resonator (MRR) switch based on III-V/Si hybrid metal-oxide-semiconductor (MOS) optical phase shifter using ultrathin InP membrane. We successfully demonstrate proof-of-concept MRR switch with ultra-low power consumption and low thermal crosstalk, which is applicable for programmable silicon photonic integrated circuits such as MRR crossbar array for optical neural network.